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Semiconductor Products
MSP’s Turbo Vaporizer™ is a droplet-vaporization, direct liquid injection vaporizer for liquid source vaporization and vapor delivery in thin film deposition by CVD, PECVD and ALD processes. Our contamination control products include cleanroom foggers, NIST-Traceable PSL and silica sphere wafers and Particle Deposition Systems to create particle size standards for calibrating wafer surface inspection tools.
We also offer custom deposition service for our customers.Contact factory for details.
Calibration Wafer Standards
- M2200 Calibration Wafer Standards - Full PSL Depositions
- M2200 Calibration Wafer Standards - Patterned PSL Depositions
- M2300NPT-1 Particle Deposition System
- M2300NPT-2 Particle Deposition System
Contamination Control
- M1110 - Water-based Condensation Particle Counter, 3 L/min
- M2001/M2010 Portable Cleanroom Fogger
- M2045 High Output PSL Particle Generator
- M2110 Cleanroom Cascade Impactor