MSP Corporation is a global, applied aerosol/particle technology company providing advanced instruments, products and services to the semiconductor, pharmaceutical, and air pollution industries. We are known around the world for advanced aerosol particle control, offering ingenious solutions to complex aerosol problems involving the generation, deposition, sampling and/or measurement of nano particles from 3nm to 100 µm in size. Well-conceived displays, features and interfaces are combined with our advanced technology. Our company was incorporated in the State of Minnesota in 1985 and has product distribution in Europe, Asia and across the United States, Canada and South America.

SEMICONDUCTOR and CLEANROOM PRODUCTS: The 2300XP1 product supports Metrology/Wet Clean/Etch Managers in search for ways to reduce wafer contamination in the fab. We provide the leading technology in electrostatic classifier design, providing the most advanced, differential mobility analyzers (DMA) with 4 Dimensional™ particle size control to ensure PSL and Particle size accuracy is maintained. PSL spheres are deposited on the wafer surface to provide PSL Wafer Standards for size response calibration of KLA-Tencor (SP1-TBI, SP1-DLS, 6420, 6220, 5500), TopCon, Hitachi, ADE and Inspex Scanning Surface Inspection Systems (SSIS). MSP participated with and guided NIST and SEMI Standards in the development of the calibration protocol (SEMI 3094 document) in order that SSIS tools around the world are uniformly calibrated for size accuracy. Real-world process particles, such as SiO2, Al2O3, TiO2, Si3N4, Si, Ti, W, Ta, Cu, etc. are deposited on the surface with narrow, size distributions to create Particle Wafer Standards in support of yield improvements in the fab.

Our Model 2001 and 2010 Portable, Ultra Pure Cleanroom Foggers are provided to visualize cleanroom airflow without adding contamination to the airflow. The Model 3100 AutoScan™ is the most advanced ULPA/HEPA Filter Test System designed to support high throughput filter testing (from 1 x 1 foot to 3 x 6 foot dimensions) by providing leak detection, pressure checks, and % efficiency measurement from 4/9 (99.99%) to 7/9 (99.99999%) applications.

PHARMACEUTICAL AEROSOL TESTING PRODUCTS: Major products include the Next Generation Impactor, (NGI) which is a significant technical advancement over our previous Marple-Miller Impactor (MMI™) for size distribution analysis of Meter-Dose Inhalers (MDI) and Dry-Powder Inhalers (DPI). A Sample Recovery System, (SRS™) is provided to speed the analysis of samples captured during MDI and DPI testing. The SRS™ is fully automated to duplicate existing test methods, but removes inherent problems encountered in manual sampling and data collection found in the production/engineering of MDIs and DPIs.

AEROSOL SAMPLING IMPACTOR PRODUCTS: The MOUDI™ and NANO- MOUDI™ products are the most advanced and accurate cascade impactors for size distribution analysis of airborne particles from 5.6 nm to 18µm. Personal and micro- environmental air sampling is easily supported through our Personal Environmental Monitor™ (PEM™), and Micro-Environmental Monitor™ (MEM™). For particle sampling on aircrafts our multi-channel aerosol sampler can be used.

AEROSOL COUNTING AND SIZING PRODUCTS: The WIDE-RANGE PARTICLE SPECTROMETER, or WPS™ products are the most advanced and user-friendly aerosol counting and sizing instrument ever developed. It combines laser light scattering, differential mobility analysis, and condensation particle counting to automatically count and size particles from 10nm to 10,000nm. Also available as a Scanning Mobility Spectrometer, or SMS™ for counting and sizing particles in the 10nm to 500nm range.