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Ultrapure Cleanroom Foggers™
- Model 2001 Ultrapure Cleanroom Fogger
- Model 2010 Portable Ultrapure Cleanroom
Fogger

These Ultrapure Cleanroom Foggers
provide the ultimate in purity, cleanliness, and fog density
unmatched by any other fog generating techniques. They produce
a high purity DI (deionized) water fog by condensing purified
steam with liquid nitrogen by a unique, patented process.
The ultrapure water fog is neutrally buoyant, non-contaminating,
and highly visible. Other fog generators based on ultrasonic
atomization or the dry-ice CO2 process create invisible residue
particles when the droplets evaporate, making them unsuitable
for use in Class 1/10/100 cleanrooms. The Ultrapure Cleanroom
Foggers from MSP create fogs that are truly non-contaminating
and no residue particles are produced when the droplets evaporate.
They are the only fogger suitable for used in Class 1/10/100/
1000/10000 cleanrooms for airflow and turbulence visualization,
flow balancing, and contaminant transport studies around process
tools.
Features and Applications
- UltraPure DI water fog
- High fog density
- Truly non-contaminating
- No measurable residue upon evaporation of
water droplets
- Compact, easily transportable package with
stream or fog rake output
- Model 2001 Ultrapure Cleanroom Fogger
- An ultrapure fogger with high fog output at 15 cfm for
up to 50 minutes. Designed for Class 1, 10, 100, 1000, 10000
Cleanrooms.
- Model 2010 Portable, Ultrapure Cleanroom
Fogger - A compact ultrapure fogger with high fog
volume and density at 10 cfm for up to 24 minutes. Designed
for Class 1, 10, 100, 1000, 10000 Cleanrooms.
- Ultrapure, visualization of airflow turbulence
in cleanrooms
- Exhaust and ventilation studies around process
tools
- Air balance studies in Cleanrooms
Specifications
(Subject to change without notice)
| |
Model
2001 |
Model
2010 |
| Boiler
capacity |
3
liters |
2
liters |
| Dewar
capacity |
9
liters
6.4 kg (14 lb.) LN2
|
3
liters
2.2 kg (4.8 lb.) LN2 |
| Power |
115
VAC, 60 Hz, 14A |
115
VAC, 60 Hz, 10A |
| Optional |
230
VAC, 50 Hz, 8A |
230
VAC, 60 Hz, 6A |
| Dimensions |
609
x 432 x 1142 cm |
380
x 300 x 300 mm |
| (L
x W x H) |
24'
x 17'' x 45" |
15"
x 12" x 12" |
| Weight |
43
kg (95 lb.) |
15
kg (33 lb.) |
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