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Ultrapure Cleanroom Foggers™

  • Model 2001 Ultrapure Cleanroom Fogger
  • Model 2010 Portable Ultrapure Cleanroom Fogger

 

FoggerThese Ultrapure Cleanroom Foggers™ provide the ultimate in purity, cleanliness, and fog density unmatched by any other fog generating techniques. They produce a high purity DI (deionized) water fog by condensing purified steam with liquid nitrogen by a unique, patented process. The ultrapure water fog is neutrally buoyant, non-contaminating, and highly visible. Other fog generators based on ultrasonic atomization or the dry-ice CO2 process create invisible residue particles when the droplets evaporate, making them unsuitable for use in Class 1/10/100 cleanrooms. The Ultrapure Cleanroom Foggers from MSP create fogs that are truly non-contaminating and no residue particles are produced when the droplets evaporate. They are the only fogger suitable for used in Class 1/10/100/ 1000/10000 cleanrooms for airflow and turbulence visualization, flow balancing, and contaminant transport studies around process tools.

Features and Applications

  • UltraPure DI water fog
  • High fog density
  • Truly non-contaminating
  • No measurable residue upon evaporation of water droplets
  • Compact, easily transportable package with stream or fog rake output
  • Model 2001 Ultrapure Cleanroom Fogger™ - An ultrapure fogger with high fog output at 15 cfm for up to 50 minutes. Designed for Class 1, 10, 100, 1000, 10000 Cleanrooms.
  • Model 2010 Portable, Ultrapure Cleanroom Fogger™ - A compact ultrapure fogger with high fog volume and density at 10 cfm for up to 24 minutes. Designed for Class 1, 10, 100, 1000, 10000 Cleanrooms.
  • Ultrapure, visualization of airflow turbulence in cleanrooms
  • Exhaust and ventilation studies around process tools
  • Air balance studies in Cleanrooms

Specifications (Subject to change without notice)

  Model 2001 Model 2010
Boiler capacity 3 liters 2 liters
Dewar capacity

9 liters
6.4 kg (14 lb.) LN2

3 liters
2.2 kg (4.8 lb.) LN2
Power 115 VAC, 60 Hz, 14A 115 VAC, 60 Hz, 10A
Optional 230 VAC, 50 Hz, 8A 230 VAC, 60 Hz, 6A
Dimensions 609 x 432 x 1142 cm 380 x 300 x 300 mm
(L x W x H) 24' x 17'' x 45" 15" x 12" x 12"
Weight 43 kg (95 lb.) 15 kg (33 lb.)

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