This
6-stage cascade impactor samples particulate contaminants
from air or other gases and deposits them on small silicon
wafer surfaces for single particle identification by SEM,
EDX, Auger, SIMS, and other analytical techniques. It is particularly
useful for contaminant particle analysis in cleanrooms. It
can also be used as a general purpose particle sampler for
analysis by SEM, EDX, etc.
FEATURES
& APPLICATIONS
Six-stage
cascade impactor
Collect
particles by impaction from 0.05 µm - 10 µm
3-L/min
sampling flow rate
10
mm x 10 mm silicon wafer substrate
For
single particle analysis by SEM, AFM, EDX, Auger, SIMS,
and other analytical techniques
Detachable
impactor for remote sampling
Small
quite pump
7-day
solid state timer with 14 programmable starts and stops
This
6-stage cascade impactor samples particulate contaminants
from air or other gases and deposits them on small silicon
wafer surfaces for single particle identification by SEM,
EDX, Auger, SIMS, and other analytical techniques. It is particularly
useful for contaminant particle analysis in cleanrooms. It
can also be used as a general purpose particle sampler for
analysis by SEM, EDX, etc. 